BILTHOVEN, The Netherlands - July 29, 2003 - ASM International N.V. (Nasdaq: ASMI and Euronext Stock Exchange in Amsterdam: ASM) today announced that its subsidiary, ASM Europe B.V. has shipped its Levitor® 4000 RTP system for NiSi anneal applications to a customer in Japan.
The Japanese customer will use the Levitor 4000 for the development of Nickel Silicide processes in the temperature range of 200ºC to 550ºC for the 65 nm and 45 nm technology nodes. This is a recently developed application for the Levitor system that, up to now, has largely been used for implant anneal processes in the temperature range of 900ºC to 1100ºC.
Launched in 2000, the Levitor 4000 is based on a floating wafer principle: a wafer, confined between two massive hot blocks, is heated through conduction. The gas layer between the wafer surface and reactor blocks self-centers the wafer and keeps it floating without any support. The 0.15 mm thick gas enables uniform, ultra fast heating with rates up to 900ºC/s.
Ernst Granneman, Business Unit Manager of the ASM RTP business said, "This new application demonstrates that the Levitor system features (high heat-up rates and intrinsic temperature stability) are ideal for low-temperature applications, particularly below 400ºC, a range that is normally not accessible for conventional lamp-based heating systems."
About ASM
ASM International N.V. is headquartered in Bilthoven, the Netherlands. ASM International is a global company, serving one of the most important and demanding industries in the world. The Company possesses a strong technological base, state-of-the-art manufacturing facilities, a competent and qualified workforce and a highly-trained strategically-distributed support network. ASM International's subsidiaries design and manufacture equipment and materials used to produce semiconductor devices. ASM International and its subsidiaries provide production solutions for wafer processing, assembly and packaging through their facilities in the United States, Europe, Japan and Asia. ASM International's common stock shares trade on Nasdaq (symbol ASMI) and the Euronext Stock Exchange in Amsterdam (symbol ASM). For more information, visit ASMI's web site at http://www.asm.com
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Levitor shipment
Contact:
Yinka Massally
Public Relations
+1 602-470-5829
yinka.massally@asm.com
Mary Jo Dieckhaus
Investor Relations
+1 212-986-2900
maryjo.dieckhaus@asm.com